|MODERN PTFE MEMBRANE BASED HEPA/ULPA FILTERS FOR IMPROVED ENERGY SAVINGS AND RISK REDUCTION||Marc Schmidt, Ph.D., Sean O'Reilly, Mike Osborne, Ph.D., Jonathan Rajala, Ph.D.||Strict demands are put on HEPA/ULPA filters that are installed as terminal filters in cleanrooms, isolators, workbenches etc. or as last filter stage in air handling units being upstream. They must continuously guarantee safe operation while predefined air quality requirements and energy efficiency are optimized. For that the filter media itself is of major importance.
Standard filter media for HEPA/ULPA filters so far had been fiberglass paper. Being free of boron filter media based on expanded Polytetrafluoroethylene (ePTFE) is used in microelectronics since decades. Based on latest developments in membrane technology, such as PAO compatibility, ePTFE and expanded Fluoro-Resin Membrane (eFRM) based HEPA filters are on their way to replace fiberglass-based filters.
This presentation describes how ePTFE and eFRM membrane media contributes to process safety and low-cost operation.
It sets out structure of modern ePTFE and eFRM membrane media, how these air filters provide significant reduction in energy consumption and risk.
It presents results of several studies on superior stability, durability and performance of ePTFE and eFRM media over traditional fiberglass media. Based on several tests regarding mechanical and chemical resistance as well as soot loading it is demonstrated that ePTFE and eFRM media offer a significant improvement in reducing media failure risk for a retained filter integrity.
Eptfe And Efrm Hepa FiltersRisk ReductionEnergy SavingsMechanical And Chemical Resistance