PRACTICAL EXPERIENCES IN PARTICLE DEPOSITION MONITORING
Keywords:Cleanroom, Cleanroom monitoring, Particle Deposition, Surface Cleanliness, Operational quality
Abstract:The rate of particle deposition of particles determines the risk of product contamination and demonstrates the operational quality of a cleanroom. The particle deposition rate depends on the deposition velocity and concentration of particles at a certain location and time. The concentration of particles larger than 10 pm cannot be measured easily; therefore the particle deposition rate of falling particles should be measured. Since the end of 2013 specific particle deposition meters, that measure the particle size distribution and rate of particle deposition, are available. Particle deposition measurements were complicated and expensive in the past. Therefore these were only executed in specific cleanroom applications or to investigate contamination problems. Nowadays it is easy to apply particle deposition measurement in various cleanrooms where operator activities are important. The new instruments make also real time particle deposition measurements possible. Practical experiences with these instruments in various applications are described in this article.
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