50 Years, 50 Articles

Performance Required for Air Shower and Effectiveness of Performance

Authors:

Akihiro Maruyama, Mamoru Okamoto, Toru Kawamata, Han Hyuck Hee

Keywords:

Air Shower, cleanroom, contamiantion

Abstract:

Before entering into cleanroom, people will use Air Shower to clean up the body covered by clean garments. Air Shower is expected to protect cleanroom environment from particle and keep the room pressures. Bu it is saying once in a while, that Air Shower is contaminate cleanroom . We evaluated the expected performances and effectiveness of Air Shower, that was installed between test cleanroom and the owning room as simulation.

Article:




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