50 Years, 50 Articles

Performance Required for Air Shower and Effectiveness of Performance


Akihiro Maruyama, Mamoru Okamoto, Toru Kawamata, Han Hyuck Hee


Air Shower, cleanroom, contamiantion


Before entering into cleanroom, people will use Air Shower to clean up the body covered by clean garments. Air Shower is expected to protect cleanroom environment from particle and keep the room pressures. Bu it is saying once in a while, that Air Shower is contaminate cleanroom . We evaluated the expected performances and effectiveness of Air Shower, that was installed between test cleanroom and the owning room as simulation.


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