Page 12 - ISCC'22
P. 12
25 th INTERNATIONAL S YMPOSIUM
October 11-13, ON CONTAMINATION CONTROL AND
Antalya TURKIYE | 2022 CLEANROOM TECHNOLOGY
12
CAPE – FLEXIBLE,
PORTABLE,
CLEANROOM
SYSTEM
Dr.-Ing. Dipl.-Phys. Udo Gommel
Department “Ultraclean Technology and Micromanufacturing”,
Fraunhofer Institute for Manufacturing Engineering and Automation
IPA; Nobelstr. 12; 70569 Stuttgart, Germany
udo.gommel@ipa.fraunhofer.de